Study of threading dislocation density reduction in AlGaN epilayers by Monte Carlo simulation of high-resolution reciprocal-space maps of a two-layer system

JOURNAL OF APPLIED CRYSTALLOGRAPHY

Lazarev, S; Barchuk, M; Bauer, S; Forghani, K; Holy, V; Scholz, F; Baumbach, T, 2013: Study of threading dislocation density reduction in AlGaN epilayers by Monte Carlo simulation of high-resolution reciprocal-space maps of a two-layer system. JOURNAL OF APPLIED CRYSTALLOGRAPHY 46(1), p. 120 - 127, doi: 10.1107/S0021889812043051