Magnetron sputtering system BESTEC (MAGNETRON)

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Guarantor: Jan Prášek, Ph.D.
Technology / Methodology: Etching & Deposition
Instrument status: Operational Operational, 17.4.2025 14:43, Installed targets: Pt(1), Ta(2), Ni(3), Nb(4), FeRh(5), Hf(6), Co(7), SiO2(8) + oxygen
Equipment placement: CEITEC Nano - C1.36
Research group: CF: CEITEC Nano


Description:

The UHV physical vapor deposition system for DC and RF thin-film sputtering deposition (mostly the metals) which utilizes strong electric and magnetic fields to increase the deposition yield. The eight sputtering target system has a reactive gas inlet for reactive deposition of oxides and nitrides as well. The substrate can be heated up to 800 °C.


Publications:

  • BENDOVÁ, M.; PRÁŠEK, J.; MOZALEV, A., 2024: XPS characterization of metal-oxide nanocolumn arrays via anodizing Al/Nb/Mo metal layers. NANOCON CONFERENCE PROCEEDINGS - INTERNATIONAL CONFERENCE ON NANOMATERIALS , p. 1 - 6, doi: 10.37904/nanocon.2023.4751; FULL TEXT
    (MAGNETRON, KRATOS-XPS)
  • Foltýn, M., 2024: Plasmonics of non-noble metals. MASTER´S THESIS , p. 1 - 83; FULL TEXT
    (HELIOS, MAGNETRON, TITAN, RIGAKU3, LITESCOPE-MIRA-STAN)
  • Castellano, A.; Alhada-Lahbabi, K.; Arregi, JA.; Uhlir, V.; Perrin, B.; Gourdon, C.; Fournier, D.; Verstraete, MJ.; Thevenard, L., 2024: Magnetic phase dependency of the thermal conductivity of FeRh from thermoreflectance experiments and numerical simulations. PHYSICAL REVIEW MATERIALS 8(8), doi: 10.1103/PhysRevMaterials.8.084411; FULL TEXT
    (MAGNETRON, VERSALAB, RIGAKU9, WOOLLAM-VIS)
  • WOJEWODA, O.; HOLOBRÁDEK, J.; PAVELKA, D.; PRIBYTOVA, E.; KRČMA, J.; KLÍMA, J.; PANDA, J.; MICHALIČKA, J.; LEDNICKÝ, T.; CHUMAK, A.; URBÁNEK, M., 2024: Unidirectional propagation of zero-momentum magnons. APPLIED PHYSICS LETTERS 125(13), p. 1 - 6, doi: 10.1063/5.0218478; FULL TEXT
    (TITAN, BRILLOUIN, KERR-MICROSCOPE, MAGNETRON, EVAPORATOR, RAITH, VERSALAB)
  • OURDANI, D.; CASTELLANO, A.; VYTHELINGUM, A.; ARREGI URIBEETXEBARRIA, J.; UHLÍŘ, V.; PERRIN, B.; BELMEGUENAI, M.; ROUSSIGNÉ, Y.; GOURDON, C.; VERSTRAETE, M.; THEVENARD, L., 2024: Experimental determination of the temperature- and phase-dependent elastic constants of FeRh. PHYSICAL REVIEW B 110(1), doi: 10.1103/PhysRevB.110.014427; FULL TEXT
    (MAGNETRON, VERSALAB)

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