FIB-SIMS quantification using TOF-SIMS with Ar and Xe plasma sources

SURFACE AND INTERFACE ANALYSIS

Stevie, FA; Sedlacek, L; Babor, P; Jiruse, J; Principe, E; Klosova, K, 2014: FIB-SIMS quantification using TOF-SIMS with Ar and Xe plasma sources. SURFACE AND INTERFACE ANALYSIS 46, p. 285 - 287, doi: 10.1002/sia.5483

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