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ODD WEEKS
DS 131: Introduction to (electron) microscopy
- 1. Introductory lecture (O. Man)
- 2. Light microscopy (P. Lepcio)
- 3. Advanced techniques in light microscopy (O. Man + M. Urbánek)
- 4. Introduction to electron microscopy (O. Man )
- 5. Scanning electron- and focused ion beam microscopy (T. Šamořil)
- 6. Sample preparation (O. Man)
- 7. Microanalytical techniques (O. Man)
- 8. Transmission electron microscopy (J. Michalička)
- 9. Analytical techniques in TEM (J. Michalička)
- 10. Scanning probe microscopy (E. Gablech)
EVEN WEEKS
DS132: Introduction to micro- and nanofabrication
- 1. Introduction to cleanroom nanofabrication for nanoscience and nanotechnology R&D (M. Urbánek)
- 2. Samples, preparation, cleaning and contamination (J. Zita)
- 3. Resists and coating (R. Hrdý)
- 4. Photolithography (R. Zahradníček)
- 5. Electron beam lithography (Z. Lišková)
- 6. Plasma technology (L. Zajíčková)
- 7. Wet and dry etching (M. Eliáš)
- 8. Deposition techniques, oxidation (J. Prášek)
- 9. Inspection techniques (M. Urbánek)
- 10. Processes, tips, tricks and examples (V. Švarc)