Ultra High Vacuum Preparation and Analytical System - Custom Deposition Chamber SPECS (UHV-DEPOSITION)

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Guarantor: Josef Polčák, Ph.D.
Instrument status: Operational Operational, 14.11.2023 14:56
Equipment placement: CEITEC Nano - C1.38
Research group: CF: CEITEC Nano


Description:

The UHV-DEPOSITION - a multi-purpose chamber for the preparation of surfaces and thin layers (UHV-Deposition) is one of the instruments of the UHV-Cluster, which combines preparation and in-situ analysis by several complementary methods for the characterization of surfaces and thin films. It provides:
- the possibility of preparation of samples and of deposition of materials by thermal evaporation (e.g. metals, organics).
- calibration of deposition rates by a quartz microbalance.
- the possibility to mount custom components like effusion cells.
The chamber is equipped with an RF plasma source for atomic nitrogen and oxygen.
Equipment: sample heating by electron beam heater up to 1400 °C, sample cooling by L-N2, pyrometer for temperature measurement.


Publications:

  • JAKUB, Z.; TRLLOVÁ SHAHSAVAR, A.; PLANER, J.; HRŮZA, D.; HERICH, O.; PROCHÁZKA, P.; ČECHAL, J., 2024: How the Support Defines Properties of 2D Metal-Organic Frameworks: Fe-TCNQ on Graphene versus Au(111). JOURNAL OF THE AMERICAN CHEMICAL SOCIETY 146(5), p. 3471 - 12, doi: 10.1021/jacs.3c13212; FULL TEXT
    (UHV-DEPOSITION, UHV-LEEM, UHV-XPS, UHV-PREPARATION, UHV-SPM)
  • KRAJŇÁK, T.; STARÁ, V.; PROCHÁZKA, P.; PLANER, J.; SKÁLA, T.; BLATNIK, M.; ČECHAL, J., 2024: Robust Dipolar Layers between Organic Semiconductors and Silver for Energy-Level Alignment. ACS APPLIED MATERIALS & INTERFACES 16(14), p. 18099 - 13, doi: 10.1021/acsami.3c18697; FULL TEXT
    (UHV-LEEM, UHV-XPS, UHV-PREPARATION, UHV-SPM, UHV-DEPOSITION)
  • Jeřábek, F., 2023: Microscopic and spectroscopic analysis of elementary 2D materials. BACHELOR´S THESIS , p. 1 - 42; FULL TEXT
    (UHV-DEPOSITION, UHV-PREPARATION, UHV-LEEM, UHV-SPM)
  • Makoveev, A. O., 2023: Molecular self-assembly on surfaces: the role of coverage, surface orientation and kinetics. PH.D. THESIS , p. 1 - 169; FULL TEXT
    (UHV-DEPOSITION, UHV-LEEM, UHV-XPS, UHV-PREPARATION, UHV-SPM)
  • PROCHÁZKA, P.; ČECHAL, J., 2023: Visualization of molecular stacking using low-energy electron microscopy. ULTRAMICROSCOPY 253, doi: 10.1016/j.ultramic.2023.113799; FULL TEXT
    (UHV-DEPOSITION, UHV-LEEM, UHV-PREPARATION, UHV-SPM)

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