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Sputter depth profiling of Mo/B4C/Si and Mo/Si multilayer nanostructures: A round-robin characterization by different techniques

BER, B.; BÁBOR, P.; BRUNKOV, P.; CHAPON, P.; DROZDOV, M.; DUDA, R.; KAZANTSEV, D.; POLKOVNIKOV, V.; YUNIN, P.; TOLSTOGOUZOV, A., 2013: Sputter depth profiling of Mo/B4C/Si and Mo/Si multilayer nanostructures: A round-robin characterization by different techniques. , p. 96 - 10; FULL TEXT

Research Groups:

• Fabrication and Characterisation of Nanostructures

CEITEC authors:

• Petr Bábor, Ph.D.