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Polycrystalline Silicon Layers with Enhanced Thermal Stability

SOLID STATE PHENOMENA

Lysacek, D; Sik, J; Babor, P, 2011: Polycrystalline Silicon Layers with Enhanced Thermal Stability. SOLID STATE PHENOMENA , p. 385 - 391

Research Groups:

• Fabrication and Characterisation of Nanostructures

CEITEC authors:

• Petr Bábor, Ph.D.