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Depth resolution enhancement by combined DSIMS and TOF-LEIS profiling

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

Babor, P; Duda, R; Prusa, S; Matlocha, T; Kolibal, M; Cechal, J; Urbanek, M; Sikola, T, 2011: Depth resolution enhancement by combined DSIMS and TOF-LEIS profiling. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 269(3), p. 369 - 373, doi: 10.1016/j.nimb.2010.11.087

Research Groups:

• Fabrication and Characterisation of Nanostructures